Experimental and numerical models of a field heterodyne interferometer: discussion on optical influences in measurements

Tomasz S. Tkaczyk; Romulad Jozwicki

doi:10.1117/12.397950

31 August 2000 Experimental and numerical models of a field heterodyne interferometer: discussion on optical influences in measurements

Tomasz S. Tkaczyk, Romulad Jozwicki

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Proceedings Volume 4076, Optical Diagnostics for Industrial Applications; (2000) https://doi.org/10.1117/12.397950
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

Heterodyne interferometry is a powerful method to measure the shape of surfaces. However, to the present day there are only a few papers devoted to the analysis of the influence of an interferometric optical system on measurement results. The analysis can be related to its geometrical configuration and optical system aberrations. The problem is particularly important for full field heterodyne interferometry, where the aberrations are different for different field points. The measurement method idea of the registration of travelling fringes with a fast CCD camera and theoretical considerations supported by computer calculations are presented. The harmonic approach to optical imaging is the base to analyze the influence of geometrical and aberrational parameters on the measurement results for a chosen object. The complete optical system is proposed and the measurement results obtained in the laboratory are discussed.

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Tomasz S. Tkaczyk and Romulad Jozwicki "Experimental and numerical models of a field heterodyne interferometer: discussion on optical influences in measurements", Proc. SPIE 4076, Optical Diagnostics for Industrial Applications, (31 August 2000); https://doi.org/10.1117/12.397950

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