New material processing of AIN ceramic with femtosecond, nanosecond, and microsecond laser ablation

Hiroyuki Yabe; Yoichi Hirayama; Minoru Obara

doi:10.1117/12.407315

16 August 2000 New material processing of AIN ceramic with femtosecond, nanosecond, and microsecond laser ablation

Hiroyuki Yabe, Yoichi Hirayama, Minoru Obara

Proceedings Volume 4065, High-Power Laser Ablation III; (2000) https://doi.org/10.1117/12.407315
Event: High-Power Laser Ablation, 2000, Santa Fe, NM, United States

Abstract

In this study, the new material processing characteristic of aluminum nitride (AlN) ceramic is compared with microsecond, nanosecond and femtosecond laser ablation. The conventional laser material processing technology with longer pulsewidth laser such as TEA CO₂ laser, Q-switched YAG laser, and excimer lasers leads to the thermal shock or lateral damage on target material, and those thermal effect causes the surface modification of AlN ceramic target. The comparative study of the laser ablation with microsecond TEA CO₂ laser pulse, nanosecond KrF excimer laser pulse, and femtosecond Ti:sapphire laser pulse is performed in time domain.

Citation Download Citation

Hiroyuki Yabe, Yoichi Hirayama, and Minoru Obara "New material processing of AIN ceramic with femtosecond, nanosecond, and microsecond laser ablation", Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407315

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available