Standardization for microsystem technology

Werner Brenner; A. Stelmach; J. Baret

doi:10.1117/12.382292

10 April 2000 Standardization for microsystem technology

Werner Brenner, A. Stelmach, J. Baret

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382292
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

This article sets out to first recall some of the major principles of standardization and to identify the main areas of MST where standards would be beneficial. It then sets out to identify the main organizations presently involved in standardization activities.

Citation Download Citation

Werner Brenner, A. Stelmach, and J. Baret "Standardization for microsystem technology", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382292

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