Array of niobium nanotips formed in porous anodic alumina matrix

Victor F. Surganov; G. G. Gorokh

doi:10.1117/12.382321

10 April 2000 Array of niobium nanotips formed in porous anodic alumina matrix

Victor F. Surganov, G. G. Gorokh

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382321
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

New fabrication method of nanoscale regular tips for vacuum microelectronics basing on electrochemical anodizing double- layer systems aluminum-niobium in aqueous acid electrolyte has been developed. This method allows providing very small overall emitted size and high uniform packaging densities without lithography and etching technique. Electron field emission from array of niobium nanotips formed in porous anodic alumina matrix has been investigated.

Citation Download Citation

Victor F. Surganov and G. G. Gorokh "Array of niobium nanotips formed in porous anodic alumina matrix", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382321

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