Precision of scanning magnetic and electric rheology X-Y-Z manipulators

Eugeny A. Deuline; Valeri P. Mikhailov; Oleg N. Eliseev; Victor V. Sytchev

doi:10.1117/12.368491

4 November 1999 Precision of scanning magnetic and electric rheology X-Y-Z manipulators

Eugeny A. Deuline, Valeri P. Mikhailov, Oleg N. Eliseev, Victor V. Sytchev

Proceedings Volume 3898, Photonic Systems and Applications in Defense and Manufacturing; (1999) https://doi.org/10.1117/12.368491
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

The manipulators of scanning tunneling microscope (STM) usually use 'long-travel' mechanically drived X-Y stages with piezoceramic actuators together with piezoceramic tubes. Magnetic- and electric Rheology manipulators combine the functions of the both drives in single unit and ensure the precision and the length of the travel L <EQ 200 mm along X, Y axes and L <EQ 400 mic along Z axe. Error of positioning of loop-contorlled MR- and ER drive may be expressed.

Citation Download Citation

Eugeny A. Deuline, Valeri P. Mikhailov, Oleg N. Eliseev, and Victor V. Sytchev "Precision of scanning magnetic and electric rheology X-Y-Z manipulators", Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); https://doi.org/10.1117/12.368491

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