High-precision positioning stage for microassembly purposes

Manfred Weck; Bernd Petersen

doi:10.1117/12.341267

10 March 1999 High-precision positioning stage for microassembly purposes

Manfred Weck, Bernd Petersen

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341267
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

In this paper, a LC-SEM will be presented as observation device for micro assembly purposes. Compared to other means of magnification it offers several advantages like, for instance, a large depth of field. A gripper which can be operated inside this LC-SEM has been developed and tested. It can be equipped with an endoscope for additional process observation. Its gripping arms can be changed according to the assembly task. For precise and flexible positioning of the griper a complex 7-axes positioning system has been designed. It can be operated in the LC-SEM too, and offers a tool-center-point movement of the gripper in order to keep all assembly operations in the focus of the SEM. With these devices further study of micro assembly will be possible.

Citation Download Citation

Manfred Weck and Bernd Petersen "High-precision positioning stage for microassembly purposes", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341267

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