Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers

Manfred Weck; Joachim Huemmler; Bernd Petersen

doi:10.1117/12.284484

5 September 1997 Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers

Manfred Weck, Joachim Huemmler, Bernd Petersen

Author Affiliations +

Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284484
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

The assembly of hybrid micro systems is usually done by hand with the help of tweezers and optical microscopes. It is obvious, however, that only the automation will lead to an efficient and precise assembly process. This paper describes the design, the function and the application of mechanical grippers for automated micro assembly. These grippers are powered by piezo systems and are able to move their arms in sub-micrometer steps in order to grip micro parts very precisely. They can be equipped with sensors for the detection of gripping force and have been designed especially for use in a large-chamber scanning electron microscope (LC-SEM). Process observation is a main problem in all aspects of micro technology. The LC-SEM allows on-line process observation with a very high depth of focus and a large lateral resolution. It has a 2 m³ vacuum chamber in which complete assembly units can be installed. Furthermore the electron gun is freely movable, so that a sample can be observed from all directions. An additional advantage of this microscope is the clean production environment (vacuum).

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Manfred Weck, Joachim Huemmler, and Bernd Petersen "Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284484

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