Polymeric base additives for lithographic improvement in DUV resist system

Wu-Song Huang

doi:10.1117/12.350154

11 June 1999 Polymeric base additives for lithographic improvement in DUV resist system

Wu-Song Huang

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350154
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Recently, base additives have become indispensable ingredients in high resolution chemically amplified resists. These bases act as acid scavengers to extend shelf life for low activation systems such as ketal and acetal protected polyhydroxystyrene type rest. They are also used to improve contamination resistance for high activation resist system such as TBOC and t-butyl ester containing resins. Studies have also shown that base additives can reduce linewidth slimming and PEB sensitivity for acetal systems. Actually, one of the most important benefits of base additives is to limit acid diffusion and enhance chemical contrast during exposure and bake process, hence improving resolution and process latitudes. In this paper, we show that polymeric bases provide better litho performance than small compounds. In addition, hydroxides are found to be better than carboxylate salts and amines.

Citation Download Citation

Wu-Song Huang "Polymeric base additives for lithographic improvement in DUV resist system", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350154

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available