Paper
26 March 1999 ASOC: a manufacturing integrated optics technology
Mehdi Asghari, Emma J.C. Dawnay
Author Affiliations +
Abstract
ASOCTM technology refers to the fabrication of integrated optics components in silicon-on-insulator material. The technology is based on the formation of single-mode rib waveguides offering excellent properties and numerous advantages for many applications at 1.3 and 1.55 micrometer wavelength. The advantages offered by ASOCTM technology include low-loss, low birefringence waveguides, well established mass production capability, and the availability of both hybrid and monolithic techniques for active element integration. The overall enabling technology lies in the successful development of a set of waveguide-based functional elements that can be assembled into practical integrated optics devices. The most fundamental waveguide elements include straight waveguides, bends, couplers and fiber- waveguide interfaces. Additional elements such as doped structures and waveguide gratings are often required. Discrete lasers and photo-detectors are also incorporated into ASOCTM technology to provide hybrid devices with a wide range of functionality. The technology is currently employed to manufacture devices for a range of applications in telecommunications. These include a single-fiber bi- directional optical transceiver, a DWDM laser and an optical attenuator.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mehdi Asghari and Emma J.C. Dawnay "ASOC: a manufacturing integrated optics technology", Proc. SPIE 3620, Integrated Optics Devices III, (26 March 1999); https://doi.org/10.1117/12.343736
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CITATIONS
Cited by 2 scholarly publications and 34 patents.
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KEYWORDS
Waveguides

Silicon

Etching

Integrated optics

Reflectivity

Refractive index

Dense wavelength division multiplexing

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