Multilayer coating and tests of a 10x extreme-ultraviolet lithographic camera

Eberhard Adolf Spiller; Frank J. Weber; Claude Montcalm; Sherry L. Baker; Eric M. Gullikson; James H. Underwood

doi:10.1117/12.309617

5 June 1998 Multilayer coating and tests of a 10x extreme-ultraviolet lithographic camera

Eberhard Adolf Spiller, Frank J. Weber, Claude Montcalm, Sherry L. Baker, Eric M. Gullikson, James H. Underwood

Proceedings Volume 3331, Emerging Lithographic Technologies II; (1998) https://doi.org/10.1117/12.309617
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

A new set of mirrors for the SANDIA 10X microstepper has been fabricated. The optics have been tested by optical profilometry, atomic force microscopy, EUV reflectometry and EUV scattering. THese measurements allow one to predict the performance of the camera. Mo/Si multilayer coatings with the required thickness profile were produced by DC magnetron sputtering using shadow masks in front of the rotating substrates. The figure errors of the new mirrors are considerably smaller than those obtained previously, while mid-spatial frequency roughness still needs improvement. This roughness reduces mostly the throughput of the system; i.e. most of the scattered light occurs outside the field of the camera and there is only a small reduction of contrast or resolution.

Citation Download Citation

Eberhard Adolf Spiller, Frank J. Weber, Claude Montcalm, Sherry L. Baker, Eric M. Gullikson, and James H. Underwood "Multilayer coating and tests of a 10x extreme-ultraviolet lithographic camera", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309617

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available