Optical and electrical tests of uniformity of rf PCVD carbon coatings

Malgorzata Langer; Piotr Niedzielski

doi:10.1117/12.276201

13 June 1997 Optical and electrical tests of uniformity of rf PCVD carbon coatings

Malgorzata Langer, Piotr Niedzielski

Proceedings Volume 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology; (1997) https://doi.org/10.1117/12.276201
Event: XII Conference on Solid State Crystals: Materials Science and Applications, 1996, Zakopane, Poland

Abstract

Amorphous carbon and nanocrystalline diamond layers are very interesting candidates for active and passive electronic and optoelectronic applications. One well knows that diamond films possess semiconductor properties. Because of their temperature stability, chemical inertness, large energy gap they are very perspective. The principal condition to apply them is not only to gain the high quality of the parameters but also to assure the stability of the obtained films' properties. The films discussed in this paper are deposited by r.f. dense plasma PCVD. To verify the structure quality it is sufficient to make quite easy measurements: ellipsometric ones and breakdown voltage. The structure image, on the level of ultra fine grains can be visible with the aid of atomic force microscope.

Citation Download Citation

Malgorzata Langer and Piotr Niedzielski "Optical and electrical tests of uniformity of rf PCVD carbon coatings", Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); https://doi.org/10.1117/12.276201

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