Cyclohexane-based optical coatings of diamond-like carbon

William D. Partlow; Robert E. Witkowski; R. M. Young; Richard Fedder; Fred B. Hagedorn

doi:10.1117/12.22465

1 December 1990 Cyclohexane-based optical coatings of diamond-like carbon

William D. Partlow, Robert E. Witkowski, R. M. Young, Richard Fedder, Fred B. Hagedorn

Proceedings Volume 1325, Diamond Optics III; (1990) https://doi.org/10.1117/12.22465
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Protective and anti-reflective optical coatings of diamond-like carbon have been deposited on germanium and silicon substrates from glow discharges of cyclohexane. Films of excellent quality were obtained with high deposition rates using this non-hazardous feed gas. A parametric study was carried out to determine the dependence of the process characteristics and the optical properties of the films on the electrode bias gas pressure and flow. The study determined the contours for film refractive index and deposition rates over the parameter space and also revealed information on the dependence of infrared absorption and film adhesion. Important information on process scaling was determined. A simple dependence of negative self-bias on electrode design was obtained by using electrodes of different sizes. Changes in bias as a result of the coating of grounded reactor surfaces were measured. The effect of feed gas flow on the film and process properties provided insight into the impact of reactant depletion on the deposition process. 258 / SPIE Vol. 1325 Diamond Optics 111(1990)

Citation Download Citation

William D. Partlow, Robert E. Witkowski, R. M. Young, Richard Fedder, and Fred B. Hagedorn "Cyclohexane-based optical coatings of diamond-like carbon", Proc. SPIE 1325, Diamond Optics III, (1 December 1990); https://doi.org/10.1117/12.22465

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