Optimization of electrostatic lens systems: fast approximate calculation of the imaging properites of einzel lenses

Ralf Degenhardt

doi:10.1117/12.287814

25 September 1997 Optimization of electrostatic lens systems: fast approximate calculation of the imaging properites of einzel lenses

Ralf Degenhardt

Author Affiliations +

Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.287814
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

An analytical potential model is presented that allows a fast approximate calculation of the imaging properties of einzel lenses. The axial potential of these three-electrode unipotential lenses is approximated by a linear superposition of the potentials of apertures with a circular opening. With adequately defined coefficients of the linear superposition, it is possible to approximate the axial potential of symmetric as well as asymmetric einzel lenses with 'thick' central electrodes. In the optimization process of a transfer optics consisting of five einzel lenses, a comparison with the results obtained by means of the charge density method has proven, that this rather simple potential model is sufficiently accurate to allow a reliable pre-selection of promising lens designs.

Citation Download Citation

Ralf Degenhardt "Optimization of electrostatic lens systems: fast approximate calculation of the imaging properites of einzel lenses", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.287814

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