Stability of CrFx films for phase-shifting mask

Eunah Kim; Seungbum Hong; Zhong-Tao Jiang; Sung-Chul Lim; Sang-Gyun Woo; Young-Bum Koh; Kwangsoo No

doi:10.1117/12.277261

28 July 1997 Stability of CrFx films for phase-shifting mask

Eunah Kim, Seungbum Hong, Zhong-Tao Jiang, Sung-Chul Lim, Sang-Gyun Woo, Young-Bum Koh, Kwangsoo No

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277261
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

Chromium fluoride film was thought to be a promising material as phase-shifting mask in deep-UV region. However, it degrades at humid condition. So we studied the degradation phenomena to propose a degradation mechanism of chromium fluoride films. We used several tools such as x-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS), to investigate how the composition and the chemical state change while the degradation proceeds. As a result, we could find that the degradation mechanism of chromium fluoride films can be described by multiple steps, which includes HF gas evolution, Cr-oxide precipitation, and crack propagation. This phenomena occurred all the range of the composition being applicable to the PSM at 193 nm, 248 nm, 365 nm and 436 nm. So it is required the development of other material or careful treatment of chromium fluoride for PSM applications.

Citation Download Citation

Eunah Kim, Seungbum Hong, Zhong-Tao Jiang, Sung-Chul Lim, Sang-Gyun Woo, Young-Bum Koh, and Kwangsoo No "Stability of CrFx films for phase-shifting mask", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277261

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available