Fast chip-level OPC system on mask database

Hidetoshi Ohnuma; Keisuke Tsudaka; Hiroichi Kawahira

doi:10.1117/12.277249

28 July 1997 Fast chip-level OPC system on mask database

Hidetoshi Ohnuma, Keisuke Tsudaka, Hiroichi Kawahira

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277249
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

A fast chip-level automatic optical proximity effect correction (OPC) method has been newly developed for use in ULSI device fabrication. The method here is dedicated for random logic application specific IC (ASIC) devices to improve critical dimension control in lithography process with a design rule of 0.25 micrometer and below. The newly developed OPC method applies rule based correction performed on a mask database (database constructed by a mask data format for mask writing tools). Utilizing OPC onto such database can reduce elapsed time to prepare OPCed one chip layout data significantly. Here, in succession, data compaction is performed on the database as well with a has tabled internal data hierarchy. As a result, actual elapsed correction time with data compaction for a 0.25 micrometer ASIC device wiring layer was within 3 hours, and data size after OPC was about 50 Mbytes. In terms of pattern printing accuracy with this OPC, resist edge placement errors were markedly reduced with respect to line end shortening and pattern width variation depending on the adjacent space width. In this paper, the OPC method is described in detail with actual performance applied for 0.25 micrometer ASIC devices.

Citation Download Citation

Hidetoshi Ohnuma, Keisuke Tsudaka, and Hiroichi Kawahira "Fast chip-level OPC system on mask database", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277249

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available