Micromolding: a powerful tool for large-scale production of precise microstructures

Lutz Weber; Wolfgang Ehrfeld; Herbert Freimuth; Manfred Lacher; Heinz Lehr; Bernhard Pech

doi:10.1117/12.251203

23 September 1996 Micromolding: a powerful tool for large-scale production of precise microstructures

Lutz Weber, Wolfgang Ehrfeld, Herbert Freimuth, Manfred Lacher, Heinz Lehr, Bernhard Pech

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251203
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

In recent years a number of micro machining processes have been developed suitable for the realization of industrial process applications, whereby the LIGA technique is considered to be one of the most promising and flexible technologies for the large scale fabrication of three- dimensional microstructure products. LIGA is based on the combination of deep lithography, and electroforming to realize mold inserts with high accuracy for the mass fabrication of microcomponents made from plastic material. The present report deals with the development of micromolding technologies which are applied at IMM. Specifically they are focused on the small dimensions of the molded microstructures, the high aspect ratio, and the demand for sub-micron precision. This includes the technical implementation of molding processes, the production of suitable micro mold inserts, the investigation in simulation software, the screening of polymer materials, ceramics, metallic powders or preceramic polymers and the development of quality qualification systems. The potential of micro molding processes will be demonstrated by presenting a variety of applications like micro gear wheels, micro pumps, micro optical components, splices and connectors, waveguides, optical gratings and components for chemical and biological micro reactors.

Citation Download Citation

Lutz Weber, Wolfgang Ehrfeld, Herbert Freimuth, Manfred Lacher, Heinz Lehr, and Bernhard Pech "Micromolding: a powerful tool for large-scale production of precise microstructures", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); https://doi.org/10.1117/12.251203

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