Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics

D. Munchmeyer; W. Ehrfeld

doi:10.1117/12.941277

11 January 1987 Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics

D. Munchmeyer, W. Ehrfeld

Proceedings Volume 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications; (1987) https://doi.org/10.1117/12.941277
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

By a combination of X-ray lithography, galvanoforming and molding processes, microstructures with lateral dimensions in the micrometer range, vertical dimensions of some hundred micrometers and submicrometer tolerances have been produced. An analysis of precision and surface quality achievable by this technique is given and design studies of various microoptical components are presented.

Citation Download Citation

D. Munchmeyer and W. Ehrfeld "Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics", Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); https://doi.org/10.1117/12.941277

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