Increased process stability for CVD tungsten via in-situ particle monitoring and upstream process control

Karl Huber; Tim DeSanti; Steve Felker

doi:10.1117/12.250909

13 September 1996 Increased process stability for CVD tungsten via in-situ particle monitoring and upstream process control

Karl Huber, Tim DeSanti, Steve Felker

Author Affiliations +

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250909
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

Upstream control and in-situ defect monitoring have been successfully implemented to track and improve particle performance for CVD tungsten films. An in-situ 'dark field' particle sensor was used to monitor process defect levels during tungsten deposition. The sensor was mounted directly below the CVD tungsten deposition chamber on the foreline. Information from the in-situ particle sensor and the CVD system process parameter analog output were routed to a stand alone computer where the incoming signals were recorded. In-situ particle and process parameter signals were monitored using the standard production recipe for tungsten deposition. From this data the internal variables (process parameters) affecting in-situ particle levels were determined. The internal factors were varied over a selected operating range and the in-situ particle levels quantified for each factor. These results were used to define the CVD tungsten process operating window in terms of in-situ defectivity. Additionally, other external sources were identified as contributors to in-situ defectivity.

Citation Download Citation

Karl Huber, Tim DeSanti, and Steve Felker "Increased process stability for CVD tungsten via in-situ particle monitoring and upstream process control", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250909

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available