Roughness and scattering measurements on thin films for UV/VIS applications

Angela Duparre; Axel Kiesel; Norbert Kaiser; Horst Truckenbrodt; Uwe Schuhmann

doi:10.1117/12.185778

7 September 1994 Roughness and scattering measurements on thin films for UV/VIS applications

Angela Duparre, Axel Kiesel, Norbert Kaiser, Horst Truckenbrodt, Uwe Schuhmann

Proceedings Volume 2262, Optical Thin Films IV: New Developments; (1994) https://doi.org/10.1117/12.185778
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

An attempt is presented of a systematic experimental approach to the problem of scattering and roughness modification after deposition of an optical thin film. BK 7 substrates with different surface qualities have been coated with evaporated MgF₂, LaF₃ and magnetron sputtered SiO₂ and Nb₂O₅ films as representatives of low index/high index columnar structured and structureless films, respectively. Investigations by total integrated scattering (TIS) and angle resolved scattering (ARS) at 633 nm and 325 nm as well as atomic forced microscopy (AFM) demonstrate the possibility of quite different effects of scattering and roughness modification to occur.

Citation Download Citation

Angela Duparre, Axel Kiesel, Norbert Kaiser, Horst Truckenbrodt, and Uwe Schuhmann "Roughness and scattering measurements on thin films for UV/VIS applications", Proc. SPIE 2262, Optical Thin Films IV: New Developments, (7 September 1994); https://doi.org/10.1117/12.185778

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available