In-process optical metrology for aspheric surfaces

Mauro Melozzi; Luis Pezzati; Alessandro Mazzoni

doi:10.1117/12.188122

30 September 1994 In-process optical metrology for aspheric surfaces

Mauro Melozzi, Luis Pezzati, Alessandro Mazzoni

Proceedings Volume 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics; (1994) https://doi.org/10.1117/12.188122
Event: Space Optics '94, 1994, Garmisch, Germany

Abstract

We realized a digital interferometer for measuring the shape of optical surfaces in an unstable environment. The instrument performs good quality measurements even if it is subjected to severe mechanical vibrations. Interferograms are decoded using a spatial-carrier phase-shifting technique. The system has been mounted over a polishing machine and used for on-line testing of aspheric mirror surfaces.

Citation Download Citation

Mauro Melozzi, Luis Pezzati, and Alessandro Mazzoni "In-process optical metrology for aspheric surfaces", Proc. SPIE 2210, Space Optics 1994: Space Instrumentation and Spacecraft Optics, (30 September 1994); https://doi.org/10.1117/12.188122

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