Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics

Qiancai Wei; Lian Zhou; Xianhua Chen; Nan Zheng; Bo Zhong; Jian Wang

doi:10.1117/12.2537798

18 November 2019 Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, Bo Zhong, Jian Wang

Author Affiliations +

Proceedings Volume 11189, Optical Metrology and Inspection for Industrial Applications VI; 111890P (2019) https://doi.org/10.1117/12.2537798
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Aiming at the disadvantage of small diameter, low efficiency, poor accuracy and can only measure sub-aperture of traditional contact surface shape measurement method to detect grinding optics surface, this paper uses non-contact laser displacement sensor, and proposes an in-situ measurement method to measure full-aperture surface of grinding optics, it has the characteristics of high measurement efficiency, high accuracy, large measurement aperture and the ability to measure full-aperture surface. This method is in-situ measurement, so it can measure full-aperture surface of optics with arbitrary aperture and shape after rough grinding, semi-precision grinding and fine grinding. Orthogonal co-directional grating measurement path can effectively avoid the influence of machine backlash. Therefore, the optics can be directly compensated according to the results of surface measurement, so that the surface of optics can meet the requirements. After the measurement is completed, a set of orthogonal measurement data are obtained, and the invalid data are manually clipped. Linear interpolation, nearest neighbor interpolation and cubic spline interpolation are used to interpolate the clipped data, and the orthogonal data are superimposed to obtain the final shape. The validity of this method is verified by the sub-aperture surface detection method, experiments show that the optimal surface measurement results can be obtained by cubic interpolation for both planar and aspheric optics. Using this method to compensate the grinding of 530mm×530mm 2-D off-axis aspheric optics, the full-aperture surface shape accuracy PV is better than 3.5μm.

Citation Download Citation

Qiancai Wei, Lian Zhou, Xianhua Chen, Nan Zheng, Bo Zhong, and Jian Wang "Research on full-aperture surface shape in-situ measurement technology for grinding large diameter optics", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 111890P (18 November 2019); https://doi.org/10.1117/12.2537798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Aspheric lenses

Photovoltaics

Aspheric optics

Optics manufacturing

Interferometers

Polishing

Optical testing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years