High-resolution IR laser spectral analysis in nondestructive onco-hematological diagnostics and semiconductor technique applications

Sergey D. Darchuk; Larisa A. Korovina; Vladimir G. Bebeshko; Fiodor F. Sizov

doi:10.1117/12.192003

31 October 1994 High-resolution IR laser spectral analysis in nondestructive onco-hematological diagnostics and semiconductor technique applications

Sergey D. Darchuk, Larisa A. Korovina, Vladimir G. Bebeshko, Fiodor F. Sizov

Author Affiliations +

Proceedings Volume 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1994) https://doi.org/10.1117/12.192003
Event: Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop, 1993, Kiev, Ukraine

Abstract

A constructed high resolution (<EQ 10^-3 cm^-1) laser spectrometer, based on IV-VI cryogenic injection lasers, is described in applications to early medical onco-hematological diagnostics and nondestructive control of oxygen concentration and its distribution across Si-wafers. In this kind of spectrometer the dispersive elements are absent. Scanning of the radiation wavelength is realized by changing of the injection current. The width of the spectral scanning band is determined by the value of the laser injection current and the duration of the injection current pulse. Using these kinds of spectrometers it is possible to realize not only the measurements of infrared spectra with high resolution, but also high speed of the measurements. One spectrum in the range of (Delta) (lambda) approximately equals 0.55 micrometers can be measured during 15 ms. High resolution (10^-3 - 10^-4 cm^-1) makes it possible to resolve the superfine structure of absorption bands.

Citation Download Citation

Sergey D. Darchuk, Larisa A. Korovina, Vladimir G. Bebeshko, and Fiodor F. Sizov "High-resolution IR laser spectral analysis in nondestructive onco-hematological diagnostics and semiconductor technique applications", Proc. SPIE 2113, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (31 October 1994); https://doi.org/10.1117/12.192003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available