Process monitoring during metalorganic chemical vapor deposition using FTIR spectroscopy

Stuart Farquharson; Robert M. Carangelo; John R. Haigis; Philip W. Morrison Jr.; Peter R. Solomon; Peter S. Kirlin; Peter C. Van Buskirk

doi:10.1117/12.166275

31 December 1993 Process monitoring during metalorganic chemical vapor deposition using FTIR spectroscopy

Stuart Farquharson, Robert M. Carangelo, John R. Haigis, Philip W. Morrison Jr., Peter R. Solomon, Peter S. Kirlin, Peter C. Van Buskirk

Author Affiliations +

Proceedings Volume 2069, Optical Methods for Chemical Process Control; (1993) https://doi.org/10.1117/12.166275
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

The ability of Fourier transform infrared spectroscopy to perform in-situ measurements of ferroelectric thin film properties during metalorganic chemical vapor deposition is demonstrated. Infrared measurements of film reflectance and radiance allowed determination of film composition, thickness and temperature in real-time. These spectra could also be used to follow process changes, determine deposition rate, and extract the wavelength dependent dielectric function. These data, along with computer software and optical hardware developments, are presented.

Citation Download Citation

Stuart Farquharson, Robert M. Carangelo, John R. Haigis, Philip W. Morrison Jr., Peter R. Solomon, Peter S. Kirlin, and Peter C. Van Buskirk "Process monitoring during metalorganic chemical vapor deposition using FTIR spectroscopy", Proc. SPIE 2069, Optical Methods for Chemical Process Control, (31 December 1993); https://doi.org/10.1117/12.166275

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available