Fabrication of diffractive optical elements for x-ray range

Yu A. Agafonov; Sergey V. Babin; Alexei I. Erko; A. A. Shestakov; Igor A. Schelokov

doi:10.1117/12.165701

15 December 1993 Fabrication of diffractive optical elements for x-ray range

Yu A. Agafonov, Sergey V. Babin, Alexei I. Erko, A. A. Shestakov, Igor A. Schelokov

Proceedings Volume 1992, Miniature and Micro-Optics and Micromechanics; (1993) https://doi.org/10.1117/12.165701
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Problems of microelectronics technology applications for diffractive optical elements fabrication have been considered. The results on x-ray diffractive focusing elements are described: amplitude and phase-contrast Fresnel zone plates as well as freestanding gold gratings. The creation of reflected Bragg-Fresnel lenses for soft x-ray range was made on the basis of multilayer x-ray mirrors. Considerable attention was paid to the correction of different distortion factors involved in the electron beam lithography process.

Citation Download Citation

Yu A. Agafonov, Sergey V. Babin, Alexei I. Erko, A. A. Shestakov, and Igor A. Schelokov "Fabrication of diffractive optical elements for x-ray range", Proc. SPIE 1992, Miniature and Micro-Optics and Micromechanics, (15 December 1993); https://doi.org/10.1117/12.165701

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