Fabrication of x-ray diffractive optical elements for ICF target diagnosis

Xiaoli Zhu; Deqiang Wang; Changqing Xie; Leifeng Cao; Jiamin Yang; Tianchun Ye; Jiebin Niu; Baoqin Chen; Ming Liu

doi:10.1117/12.782678

14 November 2007 Fabrication of x-ray diffractive optical elements for ICF target diagnosis

Xiaoli Zhu, Deqiang Wang, Changqing Xie, Leifeng Cao, Jiamin Yang, Tianchun Ye, Jiebin Niu, Baoqin Chen, Ming Liu

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 672208 (2007) https://doi.org/10.1117/12.782678
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The combination of electron beam lithography (EBL) and x-ray lithography (XRL) has been developed to successfully fabricate x-ray transmittive diffractive optical elements (DOE) such as Fresnel zone plates (FZP) and transmittive gratings (TG). In fabrication processes, the master masks of FZP and TG were patterned with high resolution on free standing membranes by EBL and followed by electroplating. Subsequently, the final gold FZP and TG with vertical cross section were efficiently and economically replicated by XRL and electroplating. By using this combined method, FZP based on silicon nitride (SiNx) free standing membrane was achieved with 150 nm width of outermost ring and 6.7 high aspect ratio, due to a novel sandwich resist structure. A series of TG master masks (2000 g/mm, 3333 g/mm, and 5000 g/mm) were fabricated by EBL. Furthermore, final gold TGs with 2000 g/mm and 3333 g/mm were replicated by XRL. The spectrum of 2000 g/mm TG has shown its perfect performance in x-ray spectroscopy.

Citation Download Citation

Xiaoli Zhu, Deqiang Wang, Changqing Xie, Leifeng Cao, Jiamin Yang, Tianchun Ye, Jiebin Niu, Baoqin Chen, and Ming Liu "Fabrication of x-ray diffractive optical elements for ICF target diagnosis", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672208 (14 November 2007); https://doi.org/10.1117/12.782678

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

X-rays

Electron beam lithography

Diffractive optical elements

Electroplating

Gold

Photomasks

X-ray diffraction

Show All Keywords

Keywords/Phrases

Search In:

Publication Years