Developments in 2D AFM metrology

Diana Nyyssonen

doi:10.1117/12.148949

4 August 1993 Developments in 2D AFM metrology

Diana Nyyssonen

Proceedings Volume 1926, Integrated Circuit Metrology, Inspection, and Process Control VII; (1993) https://doi.org/10.1117/12.148949
Event: SPIE'S 1993 Symposium on Microlithography, 1993, San Jose, CA, United States

Abstract

In a previous paper, a 2D atomic force probe metrology system was described. The system consists of a 2D atomic force probe used in attractive mode (non-contact) with a laser inter- ferometer system for measuring sample displacement with nanometer sensitivity. The force probe consists of a square cantilever and specially designed 2D tip. The tip and cantilever are vibrated in 2D and the shift in resonance as the surface approaches is used for surface sensing. The system is able to measure submicrometer lines and trenches with accuracy and precision at the nanometer level. This paper will discuss operational characteristics of the system and the application of 2D AFM metrology to calibration of optical and scanning electron microscope system.

Citation Download Citation

Diana Nyyssonen "Developments in 2D AFM metrology", Proc. SPIE 1926, Integrated Circuit Metrology, Inspection, and Process Control VII, (4 August 1993); https://doi.org/10.1117/12.148949

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available