Excimer laser illumination and imaging optics for controlled microstructure generation

Hans-Juergen Kahlert; U. Sarbach; Berthold Burghardt; Bernhard H. Klimt

doi:10.1117/12.143034

19 April 1993 Excimer laser illumination and imaging optics for controlled microstructure generation

Hans-Juergen Kahlert, U. Sarbach, Berthold Burghardt, Bernhard H. Klimt

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143034
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Excimer laser micromachining applications have gained more and more interest in fabrication of commercial microstructure products (e.g. multi chip modules, printed circuit boards, excimer laser stripped wires and others). The unique properties of the pulsed excimer laser radiation are the deep UV wavelength and the high peak power which result in the special material interaction for high precision micromachining. The key elements in taking full advantage of the excimer laser beam and in providing reproducible and controlled micromachining is the illumination and imaging optics. Detailed investigations were performed to understand microstructure formation (e.g. wall angle and microstructure position accuracy) in regard to illumination and imaging optics parameters. Qualitative and quantitative relations were found to explain microstructure feature performance in regard to optical and processing parameters.

Citation Download Citation

Hans-Juergen Kahlert, U. Sarbach, Berthold Burghardt, and Bernhard H. Klimt "Excimer laser illumination and imaging optics for controlled microstructure generation", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143034

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