Dr. Hans-Juergen Kahlert Profile

Dr. Hans-Juergen Kahlert

at JENOPTIK Optical Systems GmbH

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 16 May 2003 Paper

High-resolution optics for thin Si-film crystallization using excimer lasers: present status and future development

Hans-Juergen Kahlert, Berthold Burghardt, Frank Simon, Michael Stopka

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.479599

KEYWORDS: Crystals, Excimer lasers, Laser crystals, Silicon films, Glasses, Solids, Liquids, Optics manufacturing, Liquid crystals, LCDs

Read Abstract +

Proceedings Article | 16 May 2003 Paper

300 W XeCl excimer laser annealing and sequential lateral solidification in low temperature poly-silicon technology

Ludolf Herbst, Hans-Juergen Kahlert, Burkhard Fechner, Ulrich Rebhan, Rustem Osmanow

Proceedings Volume 5004, (2003) https://doi.org/10.1117/12.476825

KEYWORDS: Excimer lasers, Annealing, High power lasers, Gas lasers, LCDs, Solids, Laser applications, Pulsed laser operation, Laser sintering, Silicon

Read Abstract +

Proceedings Article | 5 September 2002 Paper

300-W XeCl excimer laser annealing techniques in low-temperature polysilicon technology

Burkhard Fechner, Ulrich Rebhan, Rustem Osmanov, Mark Schiwek, Hans-Juergen Kahlert

Proceedings Volume 4914, (2002) https://doi.org/10.1117/12.481801

KEYWORDS: Excimer lasers, Annealing, Laser development, Crystals, Silicon, Manufacturing, High power lasers, Integrated optics, Laser stabilization, Semiconductor lasers

Read Abstract +

Proceedings Article | 24 October 2000 Paper

Projection lenses for high-resolution ablation with excimer lasers: high-performance, wide-field and high-UV laser power

Johannes Schlichting, Kerstin Winkler, Lienhard Koerner, Thomas Schletterer, Berthold Burghardt, Hans-Juergen Kahlert

Proceedings Volume 4093, (2000) https://doi.org/10.1117/12.405225

KEYWORDS: Laser ablation, Excimer lasers, Lenses, Wavefronts, Monochromatic aberrations, Ultraviolet radiation, Tolerancing, Optics manufacturing, Manufacturing, Optical design

Read Abstract +

Proceedings Article | 19 April 1993 Paper

Excimer laser illumination and imaging optics for controlled microstructure generation

Hans-Juergen Kahlert, U. Sarbach, Berthold Burghardt, Bernhard Klimt

Proceedings Volume 1835, (1993) https://doi.org/10.1117/12.143034

KEYWORDS: Excimer lasers, Micromachining, Excimers, Optical components, Deep ultraviolet, High power lasers, Imaging systems, Optical design, Photomasks, Ray tracing

Read Abstract +

Proceedings Article | 1 June 1992 Paper

High-spectral-brightness 1.0-pm bandwidth DUV lithography excimer laser

Peter Lokai, Ulrich Rebhan, Uwe Stamm, Hermann Buecher, Hans-Juergen Kahlert, Dirk Basting

Proceedings Volume 1674, (1992) https://doi.org/10.1117/12.130371

KEYWORDS: Fabry–Perot interferometers, Optical lithography, Deep ultraviolet, Excimer lasers, Resonators, Lithography, Spectroscopy, Failure analysis, Modulation, Reliability

Read Abstract +

Proceedings Article | 1 July 1991 Paper

Comparison of 248-nm line narrowing resonator optics for deep-UV lithography lasers

Hans-Juergen Kahlert, Ulrich Rebhan, Peter Lokai, Dirk Basting

Proceedings Volume 1463, (1991) https://doi.org/10.1117/12.44818

KEYWORDS: Resonators, Deep ultraviolet, Excimer lasers, Optical lithography, Lithography, Fabry–Perot interferometers, Laser resonators, Light sources, Prisms, Thermography

Read Abstract +

Proceedings Article | 1 June 1990 Paper

High-repetition-rate KrF lithography excimer laser with narrow bandwidth below 2 pm

Peter Lokai, Ulrich Rebhan, Peter Oesterlin, Hans-Juergen Kahlert, Dirk Basting

Proceedings Volume 1264, (1990) https://doi.org/10.1117/12.20205

KEYWORDS: Excimer lasers, Optical lithography, Lithography, Failure analysis, Fabry–Perot interferometers, Control systems, Pulsed laser operation, Fringe analysis, Remote sensing, Power supplies

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years