High-field electron trapping and detrapping characteristics in thin SiOxNy films

Bing Liang Yang; Bai Yong Liu; Y. C. Cheng; HonLeung Kelvin Wong

doi:10.1117/12.47267

1 November 1991 High-field electron trapping and detrapping characteristics in thin SiO_xN_y films

Bing Liang Yang, Bai Yong Liu, Y. C. Cheng, HonLeung Kelvin Wong

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47267
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

The electron trapping at high-field and detrapping in thin thermally nitrided silicon oxide (SiO_xN_y) films were studied in the present work. For lightly nitrided oxide, the effective electron trap concentration was found to increase rapidly with the nitridation duration. In addition, the detrapping ratio of trapped electrons is almost zero and independent of the detrapping time and the applied field strength up to 8 MV/cm. This observation indicates that the increased traps have deeper energy levels. For heavily-nitrided sample, the surface trap concentration decreases and the energy levels of these traps become shallower. The detrapping ratio therefore increases and is an exponential function of the field strength and detrapping time. The detrapping ratio remains unchanged if no external field is applied.

Citation Download Citation

Bing Liang Yang, Bai Yong Liu, Y. C. Cheng, and HonLeung Kelvin Wong "High-field electron trapping and detrapping characteristics in thin SiO_xN_y films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available