Preparation of TiO2 thin film ultraviolet detector and its photoelectric properties by magnetron sputtering

Yi Wang; Man Zhao; Wei Jiang; Yanlong Lv; Wenjie Xu; Duo Li; Enji Jin

doi:10.1117/12.3033876

5 July 2024 Preparation of TiO₂ thin film ultraviolet detector and its photoelectric properties by magnetron sputtering

Yi Wang, Man Zhao, Wei Jiang, Yanlong Lv, Wenjie Xu, Duo Li, Enji Jin

Proceedings Volume 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024); 131830D (2024) https://doi.org/10.1117/12.3033876
Event: The 3rd International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 2024, Wuhan, China

Abstract

TiO₂ thin film UV detector was prepared by DC reactive magnetron sputtering method, and the response curves of the thin film detector under different bias voltages were measured. The relationship between the photocurrent of the detector and the wavelength of the irradiated light and the time response of the TiO₂ UV detector were studied.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yi Wang, Man Zhao, Wei Jiang, Yanlong Lv, Wenjie Xu, Duo Li, and Enji Jin "Preparation of TiO₂ thin film ultraviolet detector and its photoelectric properties by magnetron sputtering", Proc. SPIE 13183, International Conference on Optoelectronic Information and Functional Materials (OIFM 2024), 131830D (5 July 2024); https://doi.org/10.1117/12.3033876

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KEYWORDS

Ultraviolet detectors

Ultraviolet radiation

Thin films

Photocurrent

Sputter deposition

Titanium dioxide

Magnetrons

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