Power-efficient thermo-optic phase shifters with cavity-SOI

Päivi Heimala; Mikko Harjanne; Somnath Paul; Markku Kapulainen; Fei Sun; Juha Larismaa; Timo Aalto

doi:10.1117/12.3002326

12 March 2024 Power-efficient thermo-optic phase shifters with cavity-SOI

Päivi Heimala, Mikko Harjanne, Somnath Paul, Markku Kapulainen, Fei Sun, Juha Larismaa, Timo Aalto

Proceedings Volume 12891, Silicon Photonics XIX; 128910G (2024) https://doi.org/10.1117/12.3002326
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Power-efficient thermo-optic phase shifters have been demonstrated using 3 μm thick silicon on insulator (SOI) waveguides fabricated on cavity-SOI wafers. In cavity-SOI the cavities are premade in the SOI wafer which simplifies the processing of the waveguides with thermally insulated heater structures. Measurement results of asymmetric Mach-Zehnder interferometric TO switches show a 10-fold decrease in required power for α π phase shift in devices fabricated on cavity-SOI when compared to devices fabricated on plain SOI. With the cavities the required heating power for the π phase shift is only 2.1 mW. Numerical simulations support the experimental results.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Päivi Heimala, Mikko Harjanne, Somnath Paul, Markku Kapulainen, Fei Sun, Juha Larismaa, and Timo Aalto "Power-efficient thermo-optic phase shifters with cavity-SOI", Proc. SPIE 12891, Silicon Photonics XIX, 128910G (12 March 2024); https://doi.org/10.1117/12.3002326

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