Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform

Matteo Cherchi; Sami Ylinen; Mikko Harjanne; Markku Kapulainen; Tapani Vehmas; Timo Aalto; George T. Kanellos; Dimitris Fitsios; Nikos Pleros

doi:10.1117/12.2039954

8 March 2014 Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform

Matteo Cherchi, Sami Ylinen, Mikko Harjanne, Markku Kapulainen, Tapani Vehmas, Timo Aalto, George T. Kanellos, Dimitris Fitsios, Nikos Pleros

Author Affiliations +

Proceedings Volume 8990, Silicon Photonics IX; 89900F (2014) https://doi.org/10.1117/12.2039954
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

We present the first characterization results of some cascaded interleavers that we have recently fabricated on 4 μm thick Silicon on Insulator (SOI) wafers. The filters are based on strip waveguides, micron-scale bends and compact MMIs, all components with low loss and high tolerance to fabrication errors, due to the high mode confinement in the silicon region. A thorough comparison of the found results with the theoretical model will be presented, taking into account fabrication limitations. The fabricated filters will be used in the optical RAM circuits of the RAMPLAS project funded by the European Commission.

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Matteo Cherchi, Sami Ylinen, Mikko Harjanne, Markku Kapulainen, Tapani Vehmas, Timo Aalto, George T. Kanellos, Dimitris Fitsios, and Nikos Pleros "Fabrication-tolerant optical filters for dense integration on a micron-scale SOI platform", Proc. SPIE 8990, Silicon Photonics IX, 89900F (8 March 2014); https://doi.org/10.1117/12.2039954

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