Detection of particle defects on 5x reticle with pellicle

Barrie Skinner

doi:10.1117/12.3011889

20 December 2023 Detection of particle defects on 5x reticle with pellicle

Barrie Skinner

Proceedings Volume 12809, Bay Area Chrome Users Society Symposium 1985; 1280906 (2023) https://doi.org/10.1117/12.3011889
Event: 5th Annual BACUS Symposium, 1985, Sunnyvale, CA, United States

Abstract

This paper briefly describes a new automatic inspection process for 5X reticles with pellicles attached.

Citation Download Citation

Barrie Skinner "Detection of particle defects on 5x reticle with pellicle", Proc. SPIE 12809, Bay Area Chrome Users Society Symposium 1985, 1280906 (20 December 2023); https://doi.org/10.1117/12.3011889

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