Picometer optical measurement technology based on the concept of picometer comb

Mingle Qiao; Changhe Zhou; Yongfang Xie

doi:10.1117/12.2688936

27 November 2023 Picometer optical measurement technology based on the concept of picometer comb

Mingle Qiao, Changhe Zhou, Yongfang Xie

Proceedings Volume 12768, Holography, Diffractive Optics, and Applications XIII; 127681Q (2023) https://doi.org/10.1117/12.2688936
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

The frontier research of optics is about to enter the field of picometer optics from the current field of micro-nano optics, and picometer measurement is the key to picometer optics research. If we use a laser interferometer with nanoscale resolution to measure a grating with good periodic uniformity and thousands of periods, then for one single period, the resolution can be obtained at picometer scale. Based on this theory, the interference field period is measured by the SRG (scanning reference grating) method, and the periodic average value of picometer accuracy can be measured when the movement of the grating is monitored with a laser interferometer. When we know the grating period of picometer accuracy, we can modulate the holographic interference field by slightly changing the angle of the two beams of light, and make two exposures to make a grating with a slightly different picometer accuracy period, which we call a picometer comb. When the picometer comb is irradiated by the laser beam, interference fringes are generated along the propagation direction, and its period T is inversely proportional to the period difference Δd of the two-exposed picometer comb. This has far-reaching implications for the future of picometer measurement.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Mingle Qiao, Changhe Zhou, and Yongfang Xie "Picometer optical measurement technology based on the concept of picometer comb", Proc. SPIE 12768, Holography, Diffractive Optics, and Applications XIII, 127681Q (27 November 2023); https://doi.org/10.1117/12.2688936

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KEYWORDS

Optical testing

Optical gratings

Laser irradiation

Angle modulation

Holographic interferometers

Holography

Interferometers

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