Fully automatic measuring system for submicron lithography

Hisao Izawa; Kenjiro Nakai; Masami Seki

doi:10.1117/12.20073

1 June 1990 Fully automatic measuring system for submicron lithography

Hisao Izawa, Kenjiro Nakai, Masami Seki

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20073
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

The Laser Interferometric X-Y Measuring System Model XY-21 has been used around the world for many years as the standard machine of measuring coordinate of reticles and masks for IC and LSI. However, indications are that the capability of the XY-2I may not be sufficient to match the ever increasing trend toward ultra large scale integration (ULSI). In response, we have recently developed a successor to the XY-2I,the Laser Interferometric X-Y Measuring System Model XY-3I. The new system is designed to meet the requirements of the ULSI era. The XY-3I enables very accurate, full automatic measurement of pattern coordinate on masks and reticles, as well as the critical dimension (CD). The system can handle the patterns on the wafers equally well, with the capabilities of highly accurate measurement of coordinate position, CD and overlay registration of pattern. An additional feature of the XY-3I is bow compensation, which decreases fluctuation among measurement data due to bow change of sample. This paper presents the improvements, new functions, performance and applications of the XY-.3I.

Citation Download Citation

Hisao Izawa, Kenjiro Nakai, and Masami Seki "Fully automatic measuring system for submicron lithography", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20073

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available