Progress and characterization of battery-operated microplasmas by a portable optical emission spectrometer

Laiba Quadeer; Vera Zhou; Vassili Karanassios

doi:10.1117/12.2598545

1 August 2021 Progress and characterization of battery-operated microplasmas by a portable optical emission spectrometer

Laiba Quadeer, Vera Zhou, Vassili Karanassios

Author Affiliations +

Proceedings Volume 11817, Applied Optical Metrology IV; 118170L (2021) https://doi.org/10.1117/12.2598545
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

A microplasma is defined as a plasma (i.e., a mixture of ions and electrons) with one critical dimension (e.g., depth, or length, or radius) in the mm or the sub-mm (m) range. Over the years, we designed and fabricated a variety of microplasmas using technologies ranging from those borrowed from semiconductor fabrication on crystalline-Silicon substrates to 3D printing on polymeric substrates. In this presentation, the determination of excitation temperatures (Texc) is described. Determination of Texc is important because it is affecting detection limits and is described here.

Conference Presentation

Citation Download Citation

Laiba Quadeer, Vera Zhou, and Vassili Karanassios "Progress and characterization of battery-operated microplasmas by a portable optical emission spectrometer", Proc. SPIE 11817, Applied Optical Metrology IV, 118170L (1 August 2021); https://doi.org/10.1117/12.2598545

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