Speckle pattern modulation for high-resolution displacement measurements

León Schweickhardt; Andreas Tausendfreund; Dirk Stöbener; Andreas Fischer

doi:10.1117/12.2591847

20 June 2021 Speckle pattern modulation for high-resolution displacement measurements

León Schweickhardt, Andreas Tausendfreund, Dirk Stöbener, Andreas Fischer

Proceedings Volume 11782, Optical Measurement Systems for Industrial Inspection XII; 117820D (2021) https://doi.org/10.1117/12.2591847
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

For digital image speckle correlation (DISC), a novel approach is introduced where an ensemble average over multiple different speckle patterns is calculated. As a result, the measurement uncertainty of the displacement is reduced by an order of magnitude without deteriorating the spatial resolution. This enables precise surface displacement field measurements in the micrometer range with a measurement uncertainty lower than 100 nm at a spatial resolution below 20 µm. By using a digital micromirror device (DMD) for illumination modulation, measuring rates in the range of 25 Hz are possible while each measurement is based on 80 images.

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Citation Download Citation

León Schweickhardt, Andreas Tausendfreund, Dirk Stöbener, and Andreas Fischer "Speckle pattern modulation for high-resolution displacement measurements", Proc. SPIE 11782, Optical Measurement Systems for Industrial Inspection XII, 117820D (20 June 2021); https://doi.org/10.1117/12.2591847

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