Approaches for full coverage physical design space exploration and analysis by synthetic layout generation

Marwah Shafee; Joe Kwan; Wael El-Manhawy; Aliaa Kabeel; Sarah Risk; Jongha Park; SeungJo Lee; Jin Hee Kim; Mostafa Alaa; Mohamed Bahnasawi; Abdelrahman Abdelrazek; Sherif Hammouda; Kareem Madkour; Nabil Sabry

doi:10.1117/12.2551916

23 March 2020 Approaches for full coverage physical design space exploration and analysis by synthetic layout generation

Marwah Shafee, Joe Kwan, Wael El-Manhawy, Aliaa Kabeel, Sarah Risk, Jongha Park, SeungJo Lee, Jin Hee Kim, Mostafa Alaa, Mohamed Bahnasawi, Abdelrahman Abdelrazek, Sherif Hammouda, Kareem Madkour, Nabil Sabry

Author Affiliations +

Proceedings Volume 11328, Design-Process-Technology Co-optimization for Manufacturability XIV; 1132808 (2020) https://doi.org/10.1117/12.2551916
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

At the core of Design-technology co-optimization (DTCO) processes, is the Design Space Exploration (DSE), where different design schemes and patterns are systematically analyzed and design rules and processes are co-optimized for optimal yield and performance before real products are designed. Synthetic layout generation offers a solution. With rules-based synthetic layout generation, engineers design rules to generate realistic layout they will later see in real product designs. This paper shows two approaches to generating full coverage of the design space and providing contextual layout. One approach relies on Monte Carlo methods and the other depends on combining systematic and random methods to core patterns and their contextual layout. Also, in this paper we present a hierarchical classification system that catalogs layouts based on pattern commonality. The hierarchical classification is based on a novel algorithm of creating a genealogical tree of all the patterns in the design space.

Citation Download Citation

Marwah Shafee, Joe Kwan, Wael El-Manhawy, Aliaa Kabeel, Sarah Risk, Jongha Park, SeungJo Lee, Jin Hee Kim, Mostafa Alaa, Mohamed Bahnasawi, Abdelrahman Abdelrazek, Sherif Hammouda, Kareem Madkour, and Nabil Sabry "Approaches for full coverage physical design space exploration and analysis by synthetic layout generation", Proc. SPIE 11328, Design-Process-Technology Co-optimization for Manufacturability XIV, 1132808 (23 March 2020); https://doi.org/10.1117/12.2551916

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