High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing

T. Barthels; M. Reininghaus; H. Westergeling

doi:10.1117/12.2529219

9 September 2019 High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing

T. Barthels, M. Reininghaus, H. Westergeling

Proceedings Volume 11107, Laser Beam Shaping XIX; 111070K (2019) https://doi.org/10.1117/12.2529219
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

High precision multibeam processing is a useful approach to increase the productivity of high precision laser material processing by means of ultrashort pulsed (USP) laser radiation. In the field of micro- and nanostructuring multibeam ultrashort pulsed laser processing attracts increasing attention due to its ability to generate periodic pattern like filters within an economically reasonable time of up to 12.000 holes/sec. Thus, this technology has become relevant for applications in the filtration industry and biotech industry. The developed multibeamscanner (MBS) is capable of drilling holes with extremely small outlet diameters (< 1μm) into various materials with a customized arrangement and a density of more than 10.000 holes per mm². The aim is to investigate how the exit diameter of single-digit sized holes can be further reduced using the multibeamscanner and whether an increase in productivity is possible.

Citation Download Citation

T. Barthels, M. Reininghaus, and H. Westergeling "High-precision ultrashort pulsed laser drilling of micro and nano holes using multibeam processing", Proc. SPIE 11107, Laser Beam Shaping XIX, 111070K (9 September 2019); https://doi.org/10.1117/12.2529219

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