Fast micromachining using picosecond lasers

Achim Nebel; Thomas Herrmann; Bernhard Henrich; Ralf Knappe

doi:10.1117/12.601651

8 March 2005 Fast micromachining using picosecond lasers

Achim Nebel, Thomas Herrmann, Bernhard Henrich, Ralf Knappe

Proceedings Volume 5706, Critical Review: Industrial Lasers and Applications; (2005) https://doi.org/10.1117/12.601651
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Laser micromachining is mostly based, so far, on Q-switched laser sources. Their nanosecond pulse width often limits the accuracy and quality of laser processes by thermally initiated effects. Precision micromachining benefits from ultra short laser pulses. Up to now mostly amplified fs lasers with low repetition rates were used, with the result of low processing speed. New diode pumped solid-state picosecond lasers can also meet the demands of precise micro-machining. Their pulse duration of about 10 picoseconds provide the optimum performance e.g. for metal processing. These lasers also provide high average powers and much higher repetition rates of more then 100 kHz to maximize throughput. New potentials of picosecond lasers for the processing of different materials with high precision and increased speed will be discussed.

Citation Download Citation

Achim Nebel, Thomas Herrmann, Bernhard Henrich, and Ralf Knappe "Fast micromachining using picosecond lasers", Proc. SPIE 5706, Critical Review: Industrial Lasers and Applications, (8 March 2005); https://doi.org/10.1117/12.601651

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