Research on the control technology of machining marks in double-side polishing of large aperture optical element

Ying Huang; Fang Zhao; Manze He; Xiang He

doi:10.1117/12.2507812

16 January 2019 Research on the control technology of machining marks in double-side polishing of large aperture optical element

Ying Huang, Fang Zhao, Manze He, Xiang He

Author Affiliations +

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108381O (2019) https://doi.org/10.1117/12.2507812
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

For the high demand of large aperture optical element, the regular trajectory errors in machining marks of double-side polishing need to be determinately controlled. The mechanism and control method of the regular trajectory errors in machining marks were deeply studied. The process was simulated and compared with the experiment. The method of active translation and pendulum motion and polishing plate correction were proposed, proved to be efficacious on eliminating the regular machining marks by the groove of the polishing pad and local surface figure errors of the polishing plate. The method of dynamic loading and motion combination was adopted, retaining the independence of the original fast convergence process on surface figure. For the optical element with 430mm×430mm×10mm, the surface figure was controlled below 1λ(PV, λ=632.8nm). Meanwhile, the regular machining marks repeatedly produced were eliminated, which provided the essential condition for the intermediate frequency index in the rear stage, small tool precision polishing, and the high efficiency and stable machining of the optical element in the index system was realized.

Citation Download Citation

Ying Huang, Fang Zhao, Manze He, and Xiang He "Research on the control technology of machining marks in double-side polishing of large aperture optical element", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108381O (16 January 2019); https://doi.org/10.1117/12.2507812

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