Correction of mid-spatial-frequency errors by smoothing in spin motion for CCOS

Yizhong Zhang; Chaoyang Wei; Jianda Shao; Xueke Xu; Shijie Liu; Chen Hu; Haichao Zhang; Haojin Gu

doi:10.1117/12.2189050

27 August 2015 Correction of mid-spatial-frequency errors by smoothing in spin motion for CCOS

Yizhong Zhang, Chaoyang Wei, Jianda Shao, Xueke Xu, Shijie Liu, Chen Hu, Haichao Zhang, Haojin Gu

Proceedings Volume 9575, Optical Manufacturing and Testing XI; 95750D (2015) https://doi.org/10.1117/12.2189050
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Smoothing is a convenient and efficient way to correct mid-spatial-frequency errors. Quantifying the smoothing effect allows improvements in efficiency for finishing precision optics. A series experiments in spin motion are performed to study the smoothing effects about correcting mid-spatial-frequency errors. Some of them use a same pitch tool at different spinning speed, and others at a same spinning speed with different tools. Introduced and improved Shu's model to describe and compare the smoothing efficiency with different spinning speed and different tools. From the experimental results, the mid-spatial-frequency errors on the initial surface were nearly smoothed out after the process in spin motion and the number of smoothing times can be estimated by the model before the process. Meanwhile this method was also applied to smooth the aspherical component, which has an obvious mid-spatial-frequency error after Magnetorheological Finishing processing. As a result, a high precision aspheric optical component was obtained with PV=0.1λ and RMS=0.01λ.

Citation Download Citation

Yizhong Zhang, Chaoyang Wei, Jianda Shao, Xueke Xu, Shijie Liu, Chen Hu, Haichao Zhang, and Haojin Gu "Correction of mid-spatial-frequency errors by smoothing in spin motion for CCOS", Proc. SPIE 9575, Optical Manufacturing and Testing XI, 95750D (27 August 2015); https://doi.org/10.1117/12.2189050

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