PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Christian G. Schroer; Martin Seyrich; Maik Kahnt; Stephan Botta; Ralph Döhrmann; Gerald Falkenberg; Jan Garrevoet; Mikhail Lyubomirskiy; Maria Scholz; Andreas Schropp; Felix Wittwer

doi:10.1117/12.2273710

7 September 2017 PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector

Christian G. Schroer, Martin Seyrich, Maik Kahnt, Stephan Botta, Ralph Döhrmann, Gerald Falkenberg, Jan Garrevoet, Mikhail Lyubomirskiy, Maria Scholz, Andreas Schropp, Felix Wittwer

Author Affiliations +

Proceedings Volume 10389, X-Ray Nanoimaging: Instruments and Methods III; 103890E (2017) https://doi.org/10.1117/12.2273710
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.

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Christian G. Schroer, Martin Seyrich, Maik Kahnt, Stephan Botta, Ralph Döhrmann, Gerald Falkenberg, Jan Garrevoet, Mikhail Lyubomirskiy, Maria Scholz, Andreas Schropp, and Felix Wittwer "PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector", Proc. SPIE 10389, X-Ray Nanoimaging: Instruments and Methods III, 103890E (7 September 2017); https://doi.org/10.1117/12.2273710

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