Evaluation Of Rank Prismatic Lens

Richard A. Rosenthal

doi:10.1117/12.954828

20 September 1976 Evaluation Of Rank Prismatic Lens

Richard A. Rosenthal

Proceedings Volume 0080, Developments in Semiconductor Microlithography; (1976) https://doi.org/10.1117/12.954828
Event: Developments in Semiconductor Microlithography, 1976, San Jose, CA, United States

Abstract

In practical microcircuitry a two-dimensional source array is necessary to cater for various types and directional orientation of optical features at the image plane. Configurations successfully applied are the annulus and a distribution of sources at the points of a hexagon and an octagon. In each case a single concentrated mercury arc lamp is used as prime source and effectively multiplied or extended by optical means.

Citation Download Citation

Richard A. Rosenthal "Evaluation Of Rank Prismatic Lens", Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); https://doi.org/10.1117/12.954828

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