Dry Cleaning Of 10X Masks

H. R. Rottmann

doi:10.1117/12.954830

20 September 1976 Dry Cleaning Of 10X Masks

H. R. Rottmann

Proceedings Volume 0080, Developments in Semiconductor Microlithography; (1976) https://doi.org/10.1117/12.954830
Event: Developments in Semiconductor Microlithography, 1976, San Jose, CA, United States

Abstract

A 10x reticle must meet quality criteria completely because one defect, if its size exceeds the resolution of the photorepeater lens, may degrade the performance of all the related IC chips, or even cause their complete failure. The mask surfaces, therefore, must be cleaned thoroughly. The usual method, air-cleaning with a hand-held pressure nozzle, does not remove all the small particles. Liquid cleaning is more effective, but is expensive and usually involves toxic materials. The results of dry cleaning have been improved substantially by a system in which suction is applied instead of blowing. The basic system consists of a hollow metal tube connected to a vacuum pump. A long slit in the tube is brought close to the contaminated surface, which is moved past it on a linear stage. Some particles are not relloved by the air flow alone; mechanical action applied by a slowly vibrating brush dramatically improves the particle removal rate. The cleaning system effectively removes particles of glass, plastic, dandruff, and unknown materials. A few remarks on adhesion forces are given in an appendix.

Citation Download Citation

H. R. Rottmann "Dry Cleaning Of 10X Masks", Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); https://doi.org/10.1117/12.954830

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available