We demonstrate a 32-element silicon OPA chip with on-chip phase calibration. The on-chip phase calibration structure consists of interferometric structures and germanium silicon photodetectors (GeSi PDs). This structure can control any angle deflection within the scanning range without detecting the far-field patterns. In the horizontal direction, the on-chip phase calibration structure is used to achieve beam steering within the 36° scanning range, and the side-lobe suppression ratio can be close to 7dB.
We demonstrate a 63-channel grating-lobe-free optical phased array, in which end-fire antennas were fabricated with a pitch of 775 nm to eliminate grating lobe. Phase mismatch was configured to suppress the optical crosstalk in the dense waveguides. Two-dimensional beam steering within 16°× 2.7° were presented by thermal phase shifting and wavelength tuning.
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