In order to the dwell time function can be solved quickly and accurately, the sampling step length of the dwell point in the solution process of ion beam polishing dwell time has been optimized. Taking the PV value for per unit of uniform material removal and dwell time as the analysis object, the fluctuation caused of uniform removal and the total dwell time under different dwell time sampling step length are analyzed. The optimal dwell time sampling step length of ion beam polishing is 1.5σ。Using the determined sampling step length, the optical element with a diameter of 50mm is simulated polishing, and the surface PV value of the element decreases from 110.81nm to 20.06 nm. The optical element was polished by ion beam according to the simulation results, the PV value of the element surface decreased from 110.81nm to 46.46nm. The experimental results verify the effectiveness of the simulation results. Using the determined dwell point sampling step length, the dwell time can be solved quickly, and the PV value of the optical elements converges well.
This paper analyzes dot-line envelope grinding principle, which is applicable to mid-large- aperture square aspheric
optical element, determines the mathematical process control model based on X/Y/C three-axis aspheric grinding
machine, We develop the appropriate high-precision aspheric grinding manufacturing and measurement systems
software, using the plane grinding wheel to do the grinding experiments and the repeated compensation processing
experiment. The experiments show that: high-precision aspheric grinding manufacturing and measurement systems
software can be realized axisymmetric aspheric high-precision machining control and measurement; using compensation
processing of the X/Y/C three-axis aspheric grinding machine which can effectively improve the precision PV value,
surface error from the initial processing of the PV value :12 μm to the compensation processing of the PV value :3 μm .
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