Interferometry is one of the most efficient techniques in surface figure testing while the transmission surface usually limits the accuracy. Besides, standard figure interferometers often have a typical aperture of about 150 mm diameter which can not satisfy the need of large optics calibration. A novel method for characterizing the absolute surface figure of long grazing-incidence optics used in synchrotron radiation beamlines is presented. We demonstrate oblique incidence interferometry to overcome the aperture limitation. Furthermore, multiple rotating measurements are used to remove the transmission surface errors. The new solution is simple and easy without dismantling the transmission flat throughout the calibration procedure. The theoretical derivation, experiment results and uncertainty analysis are presented.
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