Dr. Keren Zhang Profile

Dr. Keren Zhang

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Publications (4)

Proceedings Article | 13 June 2022 Presentation

Materials development for immersive augmented reality experiences

Ankit Vora, Nihar Mohanty, Keren Zhang, Giuseppe Calafiore, Tingling Rao, Heeyoon Lee, Geraud Dubois, Matthew Colburn

Proceedings Volume PC12055, PC1205506 (2022) https://doi.org/10.1117/12.2622524

KEYWORDS: Augmented reality, Glasses, Head-mounted displays, Refractive index, Optical lithography, Optical components, Nano optics, Head

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Proceedings Article | 23 March 2020 Paper

Design considerations for high etch resistance spin-on carbon underlayers

Li Cui, Iou-Sheng Ke, Anton Chavez, Keren Zhang, Paul LaBeaume, Suzanne Coley, Shintaro Yamada, Jim Cameron, Lei Zhang, William Marshall, Benjamin Foltz

Proceedings Volume 11326, 113261N (2020) https://doi.org/10.1117/12.2552024

KEYWORDS: System on a chip, Polymers, Etching, Resistance, Carbon, Polymer thin films, X-rays, FT-IR spectroscopy, Reactive ion etching

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Proceedings Article | 23 March 2020 Paper

Planarized spin-on carbon hardmask

Iou-Sheng (Ike) Ke, Sheng Liu, Keren Zhang, Li Cui, Suzanne Coley, Shintaro Yamada, Jim Cameron

Proceedings Volume 11326, 1132617 (2020) https://doi.org/10.1117/12.2549015

KEYWORDS: System on a chip, Etching, Thin film coatings, Polymers, Resistance, Carbon, Chemical vapor deposition, Coating, Reactive ion etching, Silicon

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Proceedings Article | 25 March 2019 Paper

High temperature spin on carbon materials with excellent planarization and CVD compatibility

Keren Zhang, Li Cui, Shintaro Yamada, Jim Cameron, Sabrina Wong, Lawrence Chen, Suzanne Coley, Dan Greene, Joshua Kaitz, Iou-Sheng Ke, Bhooshan Popere, Paul LaBeaume, Benjamin Foltz, Lei Zhang, Kenneth Kearns, Johnpeter Ngunjiri

Proceedings Volume 10960, 1096019 (2019) https://doi.org/10.1117/12.2514968

KEYWORDS: Chemical vapor deposition, Carbon, Polymers, Resistance, Coating, Etching, 193nm lithography, Materials

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