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Hongmei Luo
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Publications (1)
Proceedings Article | 26 November 2012 Paper
Realization method of full-field point spread function
Proceedings Volume 8557, 85570L (2012) https://doi.org/10.1117/12.999615
KEYWORDS: Point spread functions, Diffraction, Zemax, Error analysis, Modulation transfer functions, Statistical analysis, Optical lithography, Matrices, Image quality, Computer simulations
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